Category Archives: Vacuum Stages

New Motion Control High Precision Vacuum Stages from Steinmeyer!

New Motion Control High Precision Vacuum Stage

BURLINGTON, MA, April 14, 2011 –Steinmeyer, Inc. offers a range of precision, high performance motion control stages suitable for ultra high vacuum applications. The model MT105-LM-HV is one example. Shown is a compact, two axis (XZ) version with travel range choice of 30 or 50 mm. Positioning accuracy is 3 microns with repeatability of +/- 0.2 micron. This product can be provided as a classic XY stage without adapter plate and can also be configured as a XYZ system. Driven by a piezo motor each stage includes stainless steel crossed roller linear bearings for smooth motion and robust load capacity. Both base and saddle are manufactured from high stiffness aluminum. All other components and hardware are selected for ultra high vacuum use (10E-10 torr).

Exhibiting both high precision and outstanding dynamic performance, these stages are ideal for demanding positioning applications in ultra high vacuum including:

– Scanning Electron Microscopy

– E-Beam Processing

– Particle Accelerators

Steinmeyer FMD has designed and shipped many multi-axis systems compatible with very high vacuum and clean room requirements as well! All vacuum stages are clean room assembled with components chosen for low out-gassing properties as well as low CVCM.

The Steinmeyer group is comprised of two manufacturing divisions located in Germany. August Steinmeyer GmbH & Co. KG (located in Albstadt) has been setting standards for high precision ball screws for over 40 years and prides itself on high quality, innovative designs to meet demanding customer requirements. Our Feinmess Dresden (FMD) division has been producing an extensive line of high precision positioning systems for well over 130 years.

For further information on this new product or others in our extensive product portfolio, call 1-781-273-6220 or e-mail John Skaltsas at or visit the Steinmeyer FMD group at: