Category Archives: Stage – Linear & Rotary Positioning

Motion Control – Two Axis X-Theta Positioning System from H2W Technologies

Motion Control – Two Axis X-Theta Positioning System

motion control -two axis positioning stage

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Santa Clarita, CA —– Motion Control – The SRT-030/360-026-01 is a two axis X-Theta positioning system ideal for precision motion control applications that require coordinated linear and rotary positioning. The 2 axis system consists of a rotary DC servo motor with encoder mounted to a moving brushless linear motor driven positioning stage.

The linear axis uses an H2W brushless linear motor BLDM-C08 to generate a continuous force of 26 lb [115.5 N] and a peak force of 78 lb [347 N] with a stroke length of 30 in [768 mm].

Motion Control – XY-Theta Alignment Stage Featuring High Resolution and High Repeatability Is Available from OES!

motion cntrol - OES

 


motion control - OESThe 100 mm diameter theta stage is driven by a precision 90:1 ratio worm gear. The resolution of the theta stage is 0.02O (non Micro-step) or 0.001O (20 Micro-steps per step motor driver in use). Repeatability is 0.005O, positional Accuracy is 0.01O and backlash is 0.005O.Van Nuys, CA – — Motion Control Components – Alignment Stage – The XYR-03-01 Alignment Stage from Optimal Engineering Systems, Inc. (OES) is a high resolution, high repeatability XY-Theta stage for such applications as: Angular glass cutting and grinding, wafer alignment, semiconductor handling, laser cutting and drilling. The linear resolution of the X and Y axis is 5µ (non-micro-step) or 0.125µ (20 micro-steps per step motor driver in use), the repeatability is 1.5µ, and positional accuracy is 5µ. The 1 mm per-turn lead screws and preloaded V-groove and crossed roller bearings add to the high precision and stiffness of the XYR-03-01 alignment stage. The linear travel of the X and Y axes is 50 mm x 50 mm.

Two-phase stepper motors are standard. The knob for manual adjustments of each axis can be replaced with an incremental encoder for position verification or closed loop operation. These black anodized Aluminum XY-Theta stages are easy to integrate into new or existing systems. Compatible Motion Controllers are available from OES and the XYR-03-01 Alignment Stage can also be ordered as a complete plug-and-play system.

About OES Optimal Engineering Systems, Inc. (OES) is a manufacturer of motion control products including: Stepper motor controllers and drivers, solenoid electronics, and positioning stages and slides. Applications include: Animation, automated assembly systems, automation, CNC machines, flight simulation, inspection systems, linear and rotary stages, machine tools, medical devices, motion control camera boom systems, optical comparators, CMMs, pan-tilt gimbals, PCB assembly & inspection, pick-and-place, positioning stages, robotics, scanners, security cameras, telescope drive mechanisms, time-lapse photography and winders

Some of the industries OES serves are: Aerospace, Astronomy, Chemical, Communications, Educational Institutes, University, Colleges, Government Agencies, National Labs, Manufacturing, Medical, Metrology, Military, Motion Control, Museum, News Agencies, Semiconductor and Test Equipment. Optimal Engineering Systems, Inc’s. competitive advantage is its state-of-the-art in-house manufacturing facility in North America enabling OES to supply clients with custom designed orders or high volume just-in-time deliveries globally.

For additional information contact Customer Service at Optimal Engineering Systems, Inc. (OES) , 6901 Woodley Ave, Van Nuys, CA 91406; Tel: 888-7071-1826, +1 (818) 222-9200, E-Mail: sales@oesincorp.com or visit the website at http://www.oesincorp.com
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Linear Motion Control – Six-Axis Linear and Rotary Positioning Stage!

H2W Technologies Six Axis Linear Motion Rotary Positioning Stage

Linear motion H2W Logo

Santa Clarita, CA —– Linear Motion Control – The SRS-080-10-020-01-3EXRTS is a six-axis positioning stage that consists of three rotary motors, with encoders, each mounted to three independently moving linear axis. It is ideal for applications that require independent multiple motions on a single travel plane.

Each linear axis uses a H2W brushless linear motor BLDM-D06 to generate a continuous/peak force of 24.8 lbs [110 N]/74.5 lbs [331 N] with each moving table capable of a total stroke length of 82 in [2083 mm]. Each linear axis has an independent non-contact 1.0-micron resolution encoder head reading a single encoder scale allowing for precise positioning using any multi-axis motion controller. Each moving table is guided by a rigid recirculating ball linear bearing block sharing a single linear bearing rail.

Each rotary axis consists of a standard 34-frame rotary stepper motor with a 40,000 counts/rev resolution encoder. Using a state-of-the-art motion control electronics package provided by H2W, each rotary stepper motor can operate as a 2-phase rotary brushless motor. Each motor can generate a continuous torque of 27.1 oz-in [3.06 N-m]. Each rotary axis is removable, which, in turn, reduces the moving weight of the linear axis to which it was mounted. This allows for larger payloads on each linear axis.

The entire stage is assembled on a single piece of aluminum extrusion, thus reducing the overall weight of the system. It has end-of-travel rubber bumper stops, a home positioning sensor, end-of-travel-sensors, and custom mounting holes are available upon request. There are also provisions that allow customer cables to be routed within the cable carriers.

Features:

  • Multiple linear motors on single magnet track Combined linear and rotary displacement
  • Rotary axis is capable of full 360-degree rotation
  • Ability to run closed loop rotary stepper motors
  • Rotary axis can be easily removed
  • Six axis of coordinated motion
  • Assembled on a single piece of aluminum extrusion
  • Cable carriers to route customer payload cables

About H2W Technologies, Inc.

H2W Technologies, Inc. is dedicated to the design and manufacture of linear and rotary motion products that are used in the motion control industry. The complete line of linear electric motors includes: Single and dual axis linear steppers, DC brush and brushless linear motors, voice coil actuators, and AC induction motors. Also offered is a complete line of ball screw, lead screw and belt driven positioning stages.

Other motion control products include: Limited angle torque motors for compact, limited angular excursion rotary servo applications, 3 phase brushless rotary servo motors with matching digital servo amplifiers and permanent magnet linear brakes for fail-safe, zero power braking for baggage handling and people moving applications as well as amusement park rides.

With over 75 years combined experience in the linear and rotary motion field, the H2W Technologies team of engineers offers the optimal solution to the most demanding motion control, requirements.

See Article: https://www.h2wtech.com/article/six-axis-linear-and-rotary-positioning-stage

See Video at Youtube: https://youtu.be/cfnl7wxrLCs

See Product: https://www.h2wtech.com/page/six-axis-linear-and-rotary-positioning-stage

For additional information contact Mark Wilson at H2W Technologies, 26380 Ferry Ct, Santa Clarita, CA 91350; Tel: 888-702-0540, Fax: 661-251-2067, E-Mail: info@h2wtech.com or visit the website at http://www.h2wtech.com

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Application – Rotary Table from Intellidrives Tackles Big Wafers!

INTELLIDRIVES’s Direct drive rotary servo tables.

Intellidrives Motion Control Component - Rotary Table for Big Wafers

Motion Control Components - Intellidrives-Logo

 

Philadelphia, PA, — Motion Control Components and Systems – The ACR-335UT direct drive rotary table from IntelLiDrives adapts linear motor technology, coupled with precision bearings, to provide faster and more accurate handling of the 300 mm semiconductor wafers.

The 335 mm diameter center opening in the ACR-335UT rotary table easily accommodates large 300 mm (12 inch) semiconductor wafers, allowing for extraction of the chip dies from the wafer during semiconductor assembly manufacturing processes or dual side wafer inspection.

Presently, semiconductor assembly equipment manufacturers do only limited wafer rotation, but ACR-335UT stage goes 360°, at up to 300 rpm speed.

Intellidrives Motion Control Component - Rotary Table for Big Wafers Actuator

This large angle wafer rotation can be done without need to align wafer carrier before placement on the table, thereby increasing throughput. An XY table that carries the rotary table is used for linear Cartesian Alignment. The large open center allows equipment above and below the table to extract precut integrated circuit dies cut from the 300 mm wafer or to do dual side wafer measurement and inspection.

 

Intellidrives Motion Control Component - Rotary Table for Big Wafers in XY Frame

Today’s mechanical drive technologies used in processing 200 mm (8 inch wafers) such as gear drive, worm drive and belt all lack positioning stiffness and accuracy. While worm gear rotary tables can fully rotate wafer , it speed is in single digit rpm. Belt drives can rotate at high speeds, but low belt stiffness and high drive inertia results is low accuracy and poor dynamics.

While these characteristics could be tolerated in the past, since it was not until advent of the large semiconductor wafers that a high accurate, precise and large open aperture rotary actuator was needed.

The ACR-335UT rotary table is essentially a linear motor “curved” to form a ring. There are 16 RotoLinear motoring modules (up 24 modules can be installed for higher torque capability) within the ring that forms the motor. Axial placement of these modules along with the ultra-thin bearing system allowed design of the very low profile rotary stage.

The positioning stiffness of the direct drive ACR-350UT rotary table allows it to achieve and to maintain arc-sec accuracy at hundreds of rpm and excellent dynamics even during fast Cartesian (XY) wafer indexing.

Also vital, and the major manufacturing challenges, were the tight tolerances on the axial and radial bearings that allowed to achieve both axial and radial run-outs well under 10 microns.

AccuRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the AccuRing stage yields the lowest total cost of ownership.

Compact package and Superior design of the AccuRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. AccuRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

AccuRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. Coreless magnetic design assures smooth rotation and dynamic performance.

Accurate Positioning is assured with contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make AccuRing the ideal solution for applications requiring frequent directional changes.

Applications:

  • Semiconductor assembly
  • Electronics assembly
  • Precision machine tools
  • Robotic handlers
  • Wafer processing
  • Automation
System Performance Unit ACR-335UT
Center aperture mm 335
Outside diameter mm 463
Stage height mm 22
Peak Torque Tp

(Nm)

100
Continuous torque

air cooling, coil 120°C

Tc120

(Nm)

25
Peak current at Tp Amp p rrms 15
Continuous current at Tc Amp c rrms 4
Recommended voltage (note 1) Uvdc

Uvac

310

220

Max speed at Tp and Us

(note 2)

RPM
Max speed at Tc and Us

(note 2)

RPM 120
Positioning resolution

(note 3)

counts/rev

 

5,820,000 (standard)

11,640,000

(optional)

Positioning resolution (arc-sec) 0.22
Accuracy Arc-sec <10
Repeatability Arc-sec <1
Run-out axial/radial micron <10
Rotor Inertia kg x m2 0.2
Stage weight M (Kg) 10
Axial load M (Kg) 50

Note 1: Rotary table can operate at lower voltages with lower speeds

Note 2: Speed values shown at rated torque

Note 3: Max speed may be limited by controller’s encoder frequency input.

Sin/cos 1 Vpp and other encoder resolutions available.

Contact the factory.

Intellidrives Motion Control Component - Rotary Table for Big Wafers Drawings

TO SEE VIDEO – LARGE APERTURE ULTRA THIN DIRECT DRIVE ROTARY TABLE – CLICK HERE

TO SEE VIDEO – INTEGRATED LARGE APERTURE XY – ROTARY SYSTEM – CLICK HERE

FOR ADDITIONAL INFORMATION – CLICK HERE

About IntelLiDrives —

IntelLiDrives, Inc. manufactures linear actuators, XY tables and rotary tables for the industry, government, science and research institutions around the world. Our precision rotary actuators, XY stages and linear actuators are used in the applications in medical devices, life sciences, semiconductor and electronic assembly manufacturing, data storage, laser processing, military/aerospace, photonics, automotive and test assembly, research and development and other industries requiring high precision and throughput motion control solutions.

For further information on this new product or others in our extensive product portfolio, call 1-215-728-6804 or e-mail Intellidrives at sales@intellidrives.com.com or go Intellidrive – Contact Us at: www.intellidrives.com/contact-us

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Motion Control – Six-Axis Linear and Rotary Positioning Stage!

H2W Technologies Six Axis Linear Motion Rotary Positioning Stage

Linear motion H2W Logo

Santa Clarita, CA —– Linear Motion Control – The SRS-080-10-020-01-3EXRTS is a six-axis positioning stage that consists of three rotary motors, with encoders, each mounted to three independently moving linear axis. It is ideal for applications that require independent multiple motions on a single travel plane.

Each linear axis uses a H2W brushless linear motor BLDM-D06 to generate a continuous/peak force of 24.8 lbs [110 N]/74.5 lbs [331 N] with each moving table capable of a total stroke length of 82 in [2083 mm]. Each linear axis has an independent non-contact 1.0-micron resolution encoder head reading a single encoder scale allowing for precise positioning using any multi-axis motion controller. Each moving table is guided by a rigid recirculating ball linear bearing block sharing a single linear bearing rail.

Each rotary axis consists of a standard 34-frame rotary stepper motor with a 40,000 counts/rev resolution encoder. Using a state-of-the-art motion control electronics package provided by H2W, each rotary stepper motor can operate as a 2-phase rotary brushless motor. Each motor can generate a continuous torque of 27.1 oz-in [3.06 N-m]. Each rotary axis is removable, which, in turn, reduces the moving weight of the linear axis to which it was mounted. This allows for larger payloads on each linear axis.

The entire stage is assembled on a single piece of aluminum extrusion, thus reducing the overall weight of the system. It has end-of-travel rubber bumper stops, a home positioning sensor, end-of-travel-sensors, and custom mounting holes are available upon request. There are also provisions that allow customer cables to be routed within the cable carriers.

Features:

  • Multiple linear motors on single magnet track Combined linear and rotary displacement
  • Rotary axis is capable of full 360-degree rotation
  • Ability to run closed loop rotary stepper motors
  • Rotary axis can be easily removed
  • Six axis of coordinated motion
  • Assembled on a single piece of aluminum extrusion
  • Cable carriers to route customer payload cables

About H2W Technologies, Inc.

H2W Technologies, Inc. is dedicated to the design and manufacture of linear and rotary motion products that are used in the motion control industry. The complete line of linear electric motors includes: Single and dual axis linear steppers, DC brush and brushless linear motors, voice coil actuators, and AC induction motors. Also offered is a complete line of ball screw, lead screw and belt driven positioning stages.

Other motion control products include: Limited angle torque motors for compact, limited angular excursion rotary servo applications, 3 phase brushless rotary servo motors with matching digital servo amplifiers and permanent magnet linear brakes for fail-safe, zero power braking for baggage handling and people moving applications as well as amusement park rides.

With over 75 years combined experience in the linear and rotary motion field, the H2W Technologies team of engineers offers the optimal solution to the most demanding motion control, requirements.

See Article: https://www.h2wtech.com/article/six-axis-linear-and-rotary-positioning-stage

See Video at Youtube: https://youtu.be/cfnl7wxrLCs

See Product: https://www.h2wtech.com/page/six-axis-linear-and-rotary-positioning-stage

For additional information contact Mark Wilson at H2W Technologies, 26380 Ferry Ct, Santa Clarita, CA 91350; Tel: 888-702-0540, Fax: 661-251-2067, E-Mail: info@h2wtech.com or visit the website at http://www.h2wtech.com

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