Motion Control – High Speed, High Force, Sub-micron Positioning, Voice Coil Stage Features 20 mm Aperture!

Equipment Solutions Voice Coil Stage

Sunnyvale, CA, — High speed, high force, sub-micron, >300 nanometer (1.1811 10-6 in.) positioning resolution, cross roller voice coil stages are self contained, compact, and can be mounted in a horizontal or vertical axis. The high speed, 20 mm (0.7874 in.) travel, Equipment Solutions’ Motion Control VCS-2020 Voice Coil Stage features a 20 mm dia. aperture. An integrated Analog position feedback sensor assures 100 nanometer (3.937 10-6 in.) repeatability. This compact voice coil stage is ideal for such micro-positioning applications as: Scanning interferometry, disk drive testing, auto focus systems, surface structure analysis, confocal microscopy, biotechnology, and semiconductor test equipment.

The compact 117 mm 75 mm 81 mm (4.60 in. 2.96 in. 3.18 in.), low mass, voice coil stage is a fully self-contained system including a high precision cross roller stage, voice coil actuator, analog position sensor, servo amplifier and servo controller. The low inertia cross roller stage is integral to the standard threaded “C” lens mount and motor coil for tip/tilt free motion. Custom lens mounts are available. The voice coil motor is rated at 17.8 N (4 lbs.) continuous force and 71.8 N (16 lbs.) peak for 10 seconds and is clean room compatible. For easy integration into a new or existing application the VCS-10H Voice Coil Stage has multiple sets of mounting holes on several surfaces.

Equipment Solutions, Inc. (ESI) is a provider of engineering and manufacturing services. ESI specializes in the design and production of automation and instrumentation products including motion control components and sub systems. ESI’s products range from galvanometer amplifiers with an integrated arbitrary waveform generator, to high-resolution displacement sensors, voice coil and stepper motor stages, amplifiers and controllers.

For additional information contact Paul Swanson at Equipment Solutions, 461 East Evelyn Ave., Sunnyvale, CA 94086; Tel: 408-245-7161, Fax: 408-245-7160, E-Mail: info@equipsolutions.com or visit the Website at http://www.equipsolutions.com

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